Solid-State Physics, Fluidics, and Analytical Techniques in Micro and Nanotechnology
Marc J. Madou
9781420055115
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| Author(s) :- Marc J. Madou | Format :- Hardback |
| Publisher :- Taylor & Francis Inc | Pub. Date :- 2011-07-13 |
| ISBN-13 :- 9781420055115 | |
| Dimensions :- 223 x 286 x 31 | |
| Weight :- 2040 |
Description
Providing a theoretical understanding of MEMS and NEMS, this book covers various aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, it discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal.
