Physics of Radio-Frequency Plasmas
PascalBraithwaite Chabert
9780521763004
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| Author(s) :- PascalBraithwaite Chabert | Format :- Hardback |
| Publisher :- Cambridge University Press | Pub. Date :- 2011-02-24 |
| ISBN-13 :- 9780521763004 | |
| Dimensions :- 250 x 174 x 24 | |
| Weight :- 932 |
Description
Focussing on the physics of low-temperature radio frequency plasmas, for graduate students and researchers in applied physics and electrical engineering.
