Fundamental Principles of Optical Lithography
Chris A. Mack
9780470727300
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| Author(s) :- Chris A. Mack | Format :- Paperback |
| Publisher :- John Wiley and Sons Ltd | Pub. Date :- 2007-11-16 |
| ISBN-13 :- 9780470727300 | |
| Dimensions :- 243 x 169 x 31 | |
| Weight :- 1002 |
Description
Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.
