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Silicon Sensors and Actuators

9783030801342

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Additional Information
Author(s) :- Format :- Hardback
Publisher :- Springer Nature Switzerland AG Pub. Date :- 2022-04-13
ISBN-13 :- 9783030801342
Edition:- 2022 ed.
Pagination :- 997 pages, 623 Illustrations, color; 261 Illustrations, black and white; XIII, 997 p. 884 illus., 62
Dimensions :- 162 x 244 x 64
Weight :- 1628
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Description

This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges.

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