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Microlithography

9781032836737

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Rs. 34293.00

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Additional Information
Author(s) :- Format :- Paperback
Publisher :- Taylor & Francis Ltd Pub. Date :- 2024-06-24
ISBN-13 :- 9781032836737
Edition:- 3 ed
Pagination :- 850 pages, 570 Illustrations, black and white
Dimensions :- 256 x 181 x 46
Weight :- 1522
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Description

Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.

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