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Atomic Layer Deposition for Semiconductors

9781489979438

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Additional Information
Author(s) :- Format :- Paperback
Publisher :- Springer-Verlag New York Inc. Pub. Date :- 2016-08-23
ISBN-13 :- 9781489979438
Edition:- Softcover reprint of the original 1st ed. 2014
Pagination :- 273 pages, 89 black & white illustrations, 81 colour illustrations, 3 black & white tables, 1 colour
Dimensions :- 235 x 155 x 15
Weight :- 427
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Description

This edited volume discusses atomic layer deposition (ALD) for all modern semiconductor devices, moving from the basic chemistry of ALD and modeling of ALD processes to sections on ALD for memories, logic devices, and machines.

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